NOVELTY - The method involves splitting a high-power laser beam (2) into multiple laser beams (6,7,8), and focusing the split laser beams onto target materials (19,20,21) in a vacuum chamber (18) using spherical lenses (14,15,16). Multiple plumes (27) are generated on the surfaces of the target materials. Ablated target materials are deposited non-uniformly on a substrate (30) covered with a mask (31). A heater (29) heats the substrate during the deposition.    USE - Method for fabricating an array of diverse materials at known locations on single substrate, which is essential in research and fabrication of compound materials such as solar cell absorber materials.    ADVANTAGE - The ability to fabricate an array of thin films on a substrate facilitates measurement process by replacing one-by-one measurement. By using a simple automatic scan or programmable switch circuits, the measurement can be automated and done much faster. By collecting output data automatically, it is possible to compare and optimize the composition, doping or temperature by an automatic program. The precursor distribution can be easily changed by adjusting substrate-to-target distance, ambient gas pressure, and even distance between the plumes. Laser spot positions on the targets can be changed, and as a result positions of the plumes can be changed, which obviously will affect precursor distribution on the substrate. With plume directionality and deposition rate non-uniformity of pulsed laser deposition, the new system has advantages such as low cost, high throughput, simplicity, flexibility, etc. and is suitable for high-throughput fabrication of an array of diverse compound materials at known locations on a single substrate, which is essential in compound materials research and fabrication.    DESCRIPTION OF DRAWING(S) - The drawing is a schematic diagram illustrating a multi-plume pulsed laser deposition system.    High-power laser beam (2)    Laser beams (6,7,8)    Spherical lenses (14,15,16)    Vacuum chamber (18)    Target materials (19,20,21)    Plumes (27)    Heater (29)    Substrate (30)    Mask (31)