NOVELTY - Manufacture of passivation stack on crystalline silicon solar cell device involves providing substrate comprising crystalline silicon layer (2), cleaning surface (21,23) of crystalline silicon layer by removing oxide layer from crystalline silicon layer, depositing layer (3) of silicon oxynitride on cleaned surface at 100-200 degrees C, preferably 100-130 degrees C, and depositing capping layer (5) comprising hydrogenated dielectric material. The deposition of silicon oxynitride layer is carried out using nitrogen oxide and silane as precursor gases in nitrogen ambient atmosphere.    USE - Manufacture of passivation stack on device used for manufacturing crystalline silicon solar cell (all claimed) for module.    ADVANTAGE - The crystalline silicon solar cell having high thermal stability and high efficiency, is manufactured using the passivation device by economical process. The module containing the silicon solar cell has excellent shunt resistance and no degradation.    DETAILED DESCRIPTION - Manufacture of passivation stack on crystalline silicon solar cell device involves providing a substrate comprising a crystalline silicon layer, such as crystalline silicon wafer or chip, cleaning surface of the crystalline silicon layer by removing an oxide layer from 1 or more portions of one side of the crystalline silicon layer, depositing a layer of silicon oxynitride on 1 or more portions of the cleaned surface at 100-200 degrees C, preferably 100-150 degrees C, more preferably 100-130 degrees C, and depositing a capping layer comprising hydrogenated dielectric material on top of the layer of silicon oxynitride. The deposition of silicon oxynitride layer is carried out using nitrogen oxide and silane as precursor gases in nitrogen ambient atmosphere, and depositing silicon oxynitride with a gas flow ratio of nitrogen oxide to silane of less than 2, preferably less than 1, and more preferably around 0.5. An INDEPENDENT CLAIM is included for manufacture of crystalline silicon solar cell (1).    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of silicon solar cell.    Silicon solar cell (1)    Crystalline silicon layer (2)    Silicon oxynitride layer (3)    Capping layer (5)    Surfaces (21,23)