NOVELTY - The method involves providing a set of precursor materials at a reaction location adjacent to a surface, where one of the set of precursor materials comprises organosilicon material. The set of precursor materials is made to react at the reaction location to form a flexible barrier film hybrid layer (170) from the set of precursor materials on the surface by performing chemical vapor deposition process to react the set of precursor materials and by plasma-polymerizing the set of precursor materials at the reaction location.    USE - Method for fabricating a display device e.g. organic LED (OLED), flat panel display, computer monitor, medical monitor, TV, billboard, light for interior or exterior illumination and signaling, heads-up display, fully transparent display, flexible display, laser printer, telephone, cell phone, smartphone, personal digital assistant, laptop computer, digital camera, camcorder, viewfinder, micro-display, a 3-D display, vehicle, large area wall, theater or stadium screen and sign (all claimed). Can also be used for fabricating an organic solar cell, organic photodetector and an organic transistor.    ADVANTAGE - The method enables using a barrier film on variety of substrates and electronic devices to reduce permeation of moisture. The method enables providing the materials with asymmetric structures to have better solution processibility. The method enables providing dendrimer substituents to enhance an ability of small molecules to undergo solution processing. The method enables providing a protective barrier coating over the OLED to reduce exposure to water vapor or oxygen, thus improving lifetime and performance of the display device.    DETAILED DESCRIPTION - The set of precursor materials is independently selected from a group consisting of methylsilane, dimethylsilane, vinyl trimethylsilane, trimethylsilane, tetramethylsilane, ethylsilane, disilanomethane, bis-methylsilano-methane, 1-2-disilanoethane, l-2-bis-methylsilano-ethane, 2-2-disilanopropane,1-3-5-trisilano-2-4-6-trimethylene, dimethylphenylsilane, diphenylmethylsilane, tetraethylortho silicate, dimethyldimethoxysilane, 1-3-5-7- tetramethylcyclotetrasiloxane, 1-3-dimethyldisiloxane, 1-1-3-3-tetramethyl disiloxane, 1-3 bis-silanomethylene-disiloxane, bis-l-methyldisiloxanyl-methane, 2-2-bis-l- methyldisiloxanyl-propane, 2-4-6-8-tetramethylcyclotetrasiloxane, octamethylcyclotetrasiloxane, 2-4-6-8-10-pentamethylcyclopentasiloxane, 1-3-5-7-tetrasilano- 2-6-dioxy-4-8-dimethylene, hexamethylcyclotrisiloxane, 1-3-5-7-9-pentamethylcyclopentasiloxane, hexamethoxydisiloxane, hexamethyldisilazane, divinyltetramethyldisilizane, hexamethylcyclotrisilazane, dimethylbis-Nmethylacetamido-silane, dimethylbis-N-ethylacetamido-silane, methylvinylbis-Nmethylacetamido-silane, methylvinylbis-N-butylacetamido-silane, methyltris-Nphenylacetamido-silane, vinyltris-N-ethylacetamido-silane, tetrakis-N- methylacetamido-silane, diphenylbis-diethylaminoxy-silane, methyltris-diethylaminoxy-silane and bis-trimethylsilyl-carbodiimide. An INDEPENDENT CLAIM is also included for a display device.    DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of an OLED.    OLED (100)    Substrate (110)    Anode (115)    Hole injection layer (120)    Hole transport layer (125)    Electron blocking layer (130)    Flexible barrier film hybrid layer (170)