NOVELTY - The apparatus (1) has a dehydration process unit (3) that dehydrates process target object (W). Conveying unit (4) conveys target object between film-forming process unit (2) and dehydration process unit through conveyance connection port (30) while maintaining process object. Communication space (40) is formed in straight shape towards film forming process unit. Control unit (6) controls conveying unit, so that portion of target object is located in dehydration side communication space (50) when dehydration process of process target object by dehydration process unit is started.    USE - Plasma film-forming apparatus for forming carbon film such as diamond like carbon (DLC) and plasma-enhanced chemical vapor deposition (PECVD) on workpiece e.g. process target object such as semiconductor substrate and components for fuel cells.    ADVANTAGE - The process target object is reliably carried in to the film-forming process unit from the dehydration process unit after a dehydration process of the process target object by the dehydration process unit. Since the time from carrying in of the workpiece from the dehydration process unit to the film-forming process unit to the electrical connection of the workpiece and electrode unit is eliminated, the cycle time is shortened. The position of the up-down direction of the hook unit is previously adjusted before carrying in of the workpiece by an operator. The conveyance to the film-forming process unit from the dehydration process unit of the process target object is ensured.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the plasma film-forming method.    DESCRIPTION OF DRAWING(S) - The drawing shows a side surface sectional view of the plasma film-forming apparatus.    Plasma film-forming apparatus (1)    Film-forming process unit (2)    Dehydration process unit (3)    Conveying unit (4)    Control unit (6)    Conveyance connection port (30)    Communication space (40)    Dehydration side communication space (50)