NOVELTY - The device has multiple pads (20) for holding a substrate, where each pad includes a flange (21). A hand (10) is formed with multiple recesses (10b). The pads are placed in the recesses and detachably attached to the hand. The flange of each pad includes an outer peripheral part detachably attached to the hand. An elastic part is able to bend in the recess. A substrate holding part (21a) rises from an inner edge of the elastic part and holds the substrate by vacuum suction.    USE - Substrate carrying device for carrying a substrate into a semiconductor production apparatus such as etching apparatus, ashing apparatus, film deposition apparatus, washing apparatus and inspection apparatus, during semiconductor device production process. Can also be used for carrying a photomask or wafer, a large-size substrate for a flat panel display and an EL element and a substrate for a solar battery.    ADVANTAGE - The substrate is vacuum-suctioned by an evacuation mechanism when the substrate is carried by a carrying arm in order to prevent the substrate from falling off a hand attached to the carrying arm. The device can replace only the flange to reduce lead time and costs necessary to repair or replace the pad. The device can prevent a gap from being formed between a holding surface of the pad and the wafer so as to absorb or accommodate warpage of the wafer and stably vacuum-suction the wafer being carried. The device provides greater safety margin to more reliably prevent the wafer from falling off the hand while being carried compared with an arrangement of the pads in which center of gravity of the wafer is not at same distance from the pads.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a pad placed in a recess formed in a hand of a substrate carrying device and detachably attached to the hand.    DESCRIPTION OF DRAWING(S) - The drawing shows an enlarged perspective view of a substrate carrying device.    Hand (10)    Recesses (10b)    Pads (20)    Flange (21)    Substrate holding part (21a)