TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Composition: The overcoat layer is organic material, inorganic material and/or organic-inorganic hybrid material.    TECHNOLOGY FOCUS - POLYMERS - Preferred Composition: The overcoat layer contains polysilazane and/or metal alkoxide compound. Preferred Properties: The thickness of the resin base material is 10-25 mu m. In 90% or more of thickness of inorganic thin film, the distance from the inorganic barrier layer surface in the thickness direction of the inorganic barrier layer is (L). A silicon distribution curves shows the relation between ratio (atomic ratio) of silicon atom with respect to total amount of silicon atom, oxygen atom and carbon atom, and distance (L). An oxygen distribution curves shows the relation between ratio (atomic ratio) of oxygen atom with respect to total amount of silicon atom, oxygen atom and carbon atom, and distance (L). A carbon distribution curves shows the relation between ratio (atomic ratio) of carbon atom with respect to total amount of silicon atom, oxygen atom and carbon atom, and distance (L). The carbon distribution curve has two extreme values. The absolute value of the difference between maximum value and minimum value of the atomic ratio of carbon in the carbon distribution curve is 3 atomic% or more. Preferred Process: During formation of inorganic barrier layer, the source gas containing organosilicon compound and oxygen gas are introduced into the discharge space between rollers which is applied magnetic field. Manufacture process further involves generating plasma and forming inorganic barrier layer into film of forming inorganic barrier layer with discharge plasma chemical vapor deposition method. The inorganic barrier layer is formed by discharge plasma chemical vapor deposition method. A heat resistant laminate film is bonded by the surface on the opposite side to the side which forms the inorganic barrier layer of the resin base material. Manufacture process further involves forming the overcoat layer, applying coating liquid containing polysilazane on the inorganic barrier layer, forming coating film, irradiating the vacuum UV ray at wavelength 200 nm or less to the coating film.