Prazo para submissão: 01 September 2024
Data de Notificação: 01/04/2025
Editora: Elsevier
Revista: Microelectronic Engineering
Detalhes:
This Special Issue addresses current and anticipated challenges facing the surface preparation and cleaning industry. The presentations target cutting-edge research cleaning technologies for the electronics industry. They will encompass front-end, back-end, packaging, equipment, materials and metrology developments and issues in wafer cleaning. Dr. David Maloney(semiconductor Processing,chemistry,materials science) Special issue information: